MEMS mirror are an electromagnetically driven mirror that incorporates our unique MEMS (micro-electro-mechanical systems) technology. We achieved an ultra-miniature scale by mounting the magnet beneath the mirror. Within a magnetic field generated by the magnet, electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that drives the mirror. Hamamatsu MEMS mirrors offer a wide optical deflection angle and high mirror reflectivity as well as low power consumption.