S8552Si photodiode


Datasheet [166 KB/PDF]

Photodiode for VUV (Vacuum UV) detection


The S8552 is a VUV (Vacuum UV) photodiode suitable for detection of ArF excimer lasers (λ=193 nm). Designed to provide optimal performance in the VUV range, this photodiode offers more stable sensitivity even after long exposure to VUV radiation compared with conventional types.


-Reliable detection improves of ArF excimer laser (λ=193 nm)
-Large photosensitive area: 10 × 10 mm
-Windowless package: 16.5 × 15.0 mm ceramic package


The chip of this product is not sealed and is exposed. Parts such as electrodes on the chip are not protected by an enclosure or window and so require especially strict care during handling compared to ordinary products.
Before using this product, always read “Unsealed products / Precautions” described below.

Unsealed products / Precautions [PDF]

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Photosensitive area 10 × 10 mm
Number of elements 1
Package Ceramic
Cooling Non-cooled
Reverse voltage (max.) 5 V
Photosensitivity (typ.) 0.06 A/W
Dark current (max.) 1000 pA
Rise time (typ.) 9 μs
Terminal capacitance (typ.) 4000 pF
Measurement condition Typ. Ta=25 ℃, unless otherwise noted, Photosensitivity: λ=193 nm

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Variation in sensitivity due to VUV exposure


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Dimensional outline (unit: mm)


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