Related products | VUV light source units

VUV Ionizers are electrostatic charge removers that use "photoionization" to apply vacuum UV light to remove static electricity. This innovative ionization method makes use of unique features of vacuum UV light to eliminate unwanted electrostatic charges in a vacuum (depressurized state) which has been impossible up to now.

Vacuum flanges

We provide E3444 series vacuum flanges that are designed for our VUV Ionizers.

Specifications

Parameter E3444
(General purpose specifications)
E3444-01
(JIS VF50)
E3444-02
(ICF114)
Unit
Flanges - (*1) JIS VG50 ICF114
Sealing method O-ring Cu gasket
Leak amount 1 x 10-10 Pa m3/s (*2)

*1: Prepare a flange that matches the E3444 contour.

*2: Result measured with helium leak detector.

Dimensional outlines (Unit: mm)

E3444

E3444-01

E3444-02

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