L11751-01FLAT EXCIMER EX-400

Catalog [2 MB/PDF]

Use of a flat long lamp and RF (radio frequency) discharge delivers stable output with uniform irradiation over a large area and less flickering. The EX-400 ensures highly accurate, high quality modification, cleaning, and bonding compared to corona discharge method, plasma method, and even other excimer lamps.

Installation example

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Specifications and dimensions

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Disclaimer
 [66KB/PDF]

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