L13129FLAT EXCIMER EX-86U

Catalog [2 MB/PDF]

The “all-in-one” design with an internal power supply achieved a compact, lightweight body that can easily be set up in production sites by eliminating installation hassles with no need to choose installation space. High versatility for in-line usage makes it simple to incorporate the EX-86U into already existing lines and relocate production lines, etc.

Installation example

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Specifications and dimensions

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Disclaimer
 [66KB/PDF]

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