Devices for Wafer inspection.

PMT (photomultiplier tubes)

In the photosensor field, photomultiplier tubes (or PMT) are known to have particularly high sensitivity. PMT also have dozens of other advantages such as high-speed response time.

MCP (microchannel plates)

MCP is an electron multiplier that detects and multiplies electrons in two dimensions. MCP is also sensitive to ions, vacuum UV rays, X-rays and gamma rays and so can also be used as devices to detect their position and energy.

Xenon lamps / mercury-xenon lamps

Xenon lamps emit a continuous spectrum with high luminance and high color temperature, ranging from the UV to visible to infrared range.

Hamamatsu Corporation Mercury Education Plan (US only)

Xenon flash lamps

Xenon flash lamps are more compact than continuous mode lamps and build up less heat. They provide a high-intensity continuous spectrum from deep ultraviolet light to ultraviolet light to visible light to infrared light.

Deuterium lamps

These are the next generation of deuterium lamps that deliver the high stability, high output and long service life required in deuterium lamps for spectrophotometry.

Flash light sources

Selecting the desired optical system components such as the lightguide allows the flash light source to emit a variety of different types of light.

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