Non-contact high precision membrane thickness measurement systems of semiconductor wafer utilizing optical method.

4 items found

c11011-01 product photo

Optical MicroGauge: C11011-01

  • Standard type
  • 25 µm to 2200 µm
  • 1 layer

Optical MicroGauge measures thickness utilizing laser interferometry. It measures glass from 25 µm to 2200 µm and silicon from 10 µm to 900 µm.

c11011-01w product photo

Optical MicroGauge: C11011-01W

  • Standard type
  • 25 µm to 2900 µm
  • 1 layer

Optical MicroGauge measures thickness utilizing laser interferometry. It measures glass from 25 µm to 2900 µm and silicon from 10 µm to 1200 µm.

c11011-21 product photo

Optical MicroGauge: C11011-21

  • Standard type
  • 25 µm to 2200 µm
  • 10 layers

Optical MicroGauge measures thickness utilizing laser interferometry. It measures glass from 25 µm to 2200 µm and silicon from 10 µm to 900 µm.

c11011-21w product photo

Optical MicroGauge: C11011-21W

  • Standard type
  • 25 µm to 2900 µm
  • 10 layers

Optical MicroGauge measures thickness utilizing laser interferometry. It measures glass from 25 µm to 2900 µm and silicon from 10 µm to 1200 µm.

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