MiNY PL Micro LED PL inspection system

C15740-01

MiNY PL is an inspection system for micro LED wafers using the photoluminescence (PL) measurement method.

Specifications

Model name C15740-01
Supported wafer size 100 mm (4 inches) or 150 mm (6 inches)  (other sizes negotiable)
Measurement time

Approx. 12 minutes

(Objective lens 10×, PL measurement, 4 inch wafers)

PL measurement wavelength R, G, B
Spatial resolution 1 μm/pixel (standard mode), 0.5 μm/pixel (high resolution mode)
Measurement items Shape abnormality, PL intensity, PL wavelength
External dimensions / weight 2000 mm (W) × 1878 mm (H) × 1130 mm (D) / Approx. 1800 kg
Clean room Compatible

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