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構造と原理 | MEMSミラー
構造と原理
MEMSミラーにおいては、単結晶シリコン上に金属のコイルを形成し、コイルの内側にMEMS加工によりミラーを形成し、ミラーの下に磁石を配置しています。
磁石の磁界中において、ミラー周辺のコイルに電流を流すことにより、フレミングの法則によってローレンツ力が発生し、ミラーに傾きが生じます。また、MEMS加工により形成された2つのバネの組み合わせにより、ミラーを2次元に駆動することが可能です。
これによりミラー面に入射したレーザ光の光路を変え、走査して投影します。電磁駆動式であるMEMSミラーは、静電式・圧電式に比べて、低電圧駆動、使いやすいことが特長です。
電磁式MEMSミラーの特徴 (ガルバノミラーとの比較)
MEMSミラーはガルバノミラーと比べて、小型、2軸対応が可能、低コストといったメリットがあります。
当社のMEMSミラーは、MEMS技術と光半導体技術を応用した電磁駆動式を採用しています。
| 項目 | MEMSミラー (電磁式) | ガルバノミラー |
|---|---|---|
| 駆動方式 | 電磁式 (ローレンツ力) | モーター (ローレンツ力) |
| 光学的振れ角 | 〇 | ◎ |
| ミラー径 | △ | ◎ |
| デバイスサイズ | ◎ | △ |
| コスト | ◎ | △ |
| 2軸対応 | 〇 | △ (2台使用) |
| 制御 | △ | ○ |
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