The X13267/X13138 series have high light utilization efficiency, which is defined a ratio of the 0th order diffraction light level to the input light level. The high light utilization efficiency mainly depends on reflectivity, and the amount of diffraction loss caused by the pixel structure. We adopted advanced CMOS technology to make the diffraction loss smaller.
As a result, the diffraction loss is less than 5%. The -02/-03/-04/-05/-06 types have a dielectric mirror which has high reflectivity. Therefore, these types have very high light utilization efficiency. The -01/-07/-08 types have relatively low light utilization efficiency compared to the ones with the dielectric mirror but have wide spectral response characteristics.
The X13267/X13138 series can achieve phase modulation of more than 2 π radians over the 400-1550 nm readout wavelength range.
The X13267/X13138 series comes pre-calibrated from the factory for a specified wavelength range to have more than 2 π radians of phase modulation and its linear characteristics. Figure 1 shows typical phase modulation characteristics. A phase shift of 2 π radians or more and a linear phase response are achieved.
The phase modulation curves for 95% pixels lies within +/- 2 σ.
The X13267/X13138 series is a pure phase SLM with high precision phase control ; therefore, it has high diffraction efficiency close to the theoretical values. Figure 2 shows images of diffracted spots, when a multi-level phase grating is formed in the X13138 series and Figure 3 shows typical diffraction efficiency characteristics. Here, the diffraction efficiency is defined I1/I0, I1 is intensity of the 1st order diffraction spot, I0 is the intensity of the 0th order light when no pattern is displayed.
The X13267/X13138 series has high precision phase control and high diffraction efficiency, and is very suitable for holographic applications.
Figure 4 (a) is a interferometer picture of the output wavefront with a flatness calibration.
The image in Figure 4(b) was reconstructed as the 1st diffraction order of the phase hologram through the Fourier transform optics. Figure 4(c) shows a clear Laguerre Gaussian (LG) beam of (0, 1) order.
LCOS-SLM includes the following patents license. Please consult us for other patents.
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