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Micro-spectrometers

Structure_technology

Besides a CMOS image sensor chip integrated with an optical slit by etching technology, the micro-spectrometer employs a refl ective concave blazed grating formed by nanoimprint. The glass used in the light path of the previous products is not used, making it extremely compact.

Structure diagram

CMOS linear image sensor with a slit [Incident light side (back of chip)]

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