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iPHEMOS-MP Inverted emission microscope

C10506-04-16

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The iPHEMOS-MP inverted emission microscope is a semiconductor failure analysis system designed to identify failure locations by detecting the light and heat emitted from the defects in semiconductor devices.Taking advantage of its inverted type design, the iPHEMOS-MP makes backside analyses of semiconductor devices while probing, and also smoothly runs various types of analyses in combination with a LSI tester. The iPHEMOS-MP includes a laser scanning system to acquire pattern images with high resolution. Different types of analysis such as emission analysis, thermal analysis, and IR-OBIRCH analysis are performable by just selecting the detector optimized for the analysis method. When combined with a dedicated prober for backside observation, the iPHEMOS-MP supports flexible measurements from wafers to individual chips.

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Features

  • Two ultra-high sensitivity cameras mountable for emission analysis and thermal analysis
  • Lasers for up to 3 wavelengths and a probe light source for EOP are mountable
  • Equipped with optical stage suitable for diverse samples

Options

  • Includes laser scan system
  • Emission analysis with high-sensitivity near-infrared camera
  • Thermal analysis with high-sensitivity mid-infrared camera
  • IR-OBIRCH analysis
  • Dynamic analysis by laser irradiation
  • EO probing analysis
  • High-resolution and high-sensitivity analysis using NanoLens
  • Connects to FA-Navigation
  • Connects to CAD Navigation
  • Connects to LSI tester

Display functions

Superimposed display/contrast enhancement function

iPHEMOS-MP Product feature

The iPHEMOS-MP superimposes the emission image on a high-resolution pattern image to localize defect points quickly. The contrast enhancement function makes an image clearer and more detailed.

Display function

  • Annotations: Comments, arrows, and other indicators can be displayed on an image at any location desired.
  • Scale display: The scale width can be displayed on the image using segments.
  • Grid display: Vertical and horizontal grid lines can be displayed on the image.
  • Thumbnail display: Images can be stored and recalled as thumbnails, and image information such as stage coordinates can be displayed.
  • Split screen display: Pattern images, emission images, superimposed images, and reference images can be displayed in a 4-window screen at once.

Specifications

Line voltage AC 200 V (50 Hz/60 Hz)
Power consumption Approx. 1400 VA (Max. 3300 VA)
Vacuum Approx. 80 kPa or more
Compressed air 0.5 MPa to 0.7 MPa
Dimensions/Weights Main unit: 1740 mm (W)×1150 mm (D)×1770 mm (H), Approx. 1400 kg
Control rack: 880 mm (W)×700 mm (D)×1542 mm (H), Approx. 255 kg
Optional desk: 1000 mm (W)×800 mm (D)×700 mm (H), Approx. 60 kg
*Weight of iPHEMOS-MP main unit includes a prober or equivalent item.

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