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MEMS-FPI spectrum sensor



Ultra-compact near infrared spectrum sensor that integrates MEMS tunable filter and photosensor, built-in band-pass filter

The MEMS-FPI spectrum sensor is a ultra-compact sensor that houses a MEMS-FPI (Fabry-Perot Interferometer) tunable filter that can vary its transmission wavelength depending on the applied voltage and InGaAs PIN photodiode in a single package. The spectral response range is 1550 to 1850 nm. It is suitable for installation in compact devices for identifying materials in plastic and solutions and other similar applications.

-Built-in band-pass filter for cutting off wavelengths outside the spectral response range
-Built-in Hamamatsu InGaAs PIN photodiode single element chip
-Spectral response range: 1550 to 1850 nm
-Ultra-compact: TO-5 package
-Ultra light: 1 g
-Hermetically sealed package: high reliability under high humidity
-Built-in thermistor

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Measurement examples

Spectral measurement of plastics

Spectral measurement of textiles


Spectral response range 1550 to 1850 nm
Spectral resolution (FWHM) max. 20 nm
Dark current max. 40 nA
Photosensitive area (Detector) φ0.1 mm
Band-pass filter integrated
Package TO-5
Note Typ., Ta=25 ℃ unless otherwise noted

Dimensional outline (unit: mm)


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