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MEMS-FPI spectrum sensor



Ultra-compact near infrared spectrum sensor that integrates MEMS-FPI tunable filter and photosensor, built-in band-pass filter

The MEMS-FPI spectrum sensor C14273 is a ultra-compact sensor that houses a MEMS-FPI (Fabry-Perot Interferometer) tunable filter that can vary its transmission wavelength depending on the applied voltage and InGaAs PIN photodiode in a single package. The spectral response range is 1750 to 2150 nm. It is suitable for installation in simple, compact instruments for measuring material absorbance and the like.

-Built-in Hamamatsu InGaAs PIN photodiode single element chip
-Spectral response range: 1750 to 2150 nm
-Ultra-compact: TO-5 package
-Ultra light: 1 g
-Hermetically sealed package: high reliability under high humidity environment
-Built-in thermistor
-Built-in band-pass filter for cutting off wavelengths outside the spectral response range

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Measurement examples

Spectral measurement of plastics

Spectral measurement of textiles


Spectral response range 1750 to 2150 nm
Spectral resolution (FWHM) max. 22 nm
Dark current max. 150 nA
Photosensitive area (Detector) φ0.3 mm
Band-pass filter integrated
Package TO-5
Note Typ., Ta=25 ℃ unless otherwise noted

Dimensional outline (unit: mm)


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