MEMS-FPI spectrum sensor
The MEMS-FPI spectrum sensor is a ultra-compact sensor that houses a MEMS-FPI (Fabry-Perot Interferometer) tunable filter that can vary its transmission wavelength depending on the applied voltage and InGaAs PIN photodiode in a single package. The spectral response range is 1550 to 1850 nm. It is suitable for installation in compact devices for identifying materials in plastic and solutions and other similar applications.
- Built-in Hamamatsu InGaAs PIN photodiode single element chip
- Spectral response range: 1550 to 1850 nm
- Ultra-compact: TO-5 package
- Ultra light: 1 g
- Hermetically sealed package: high reliability under high humidity
- Built-in thermistor
- Built-in band-pass filter for cutting off wavelengths outside the spectral response rang
A demonstration module with a built-in MEMS-FPI spectrum sensor and near infrared light source measured the reflection spectrum of the plastics. From the spectrum obtained, it is possible to distinguish the component of plastic.
A demonstration module with a built-in MEMS-FPI spectrum sensor and near infrared light source measured the reflection spectrum of the textiles. From the spectrum obtained, it is possible to distinguish the component of clothing fabric.
|Spectral response range||1550 to 1850 nm||1550 to 1850 nm||1350 to 1650 nm||1750 to 2150 nm|
|Spectral resolution (FWHM) max.||20 nm||20 nm||18 nm||22 nm|
|Dark current max.||40 nA||100 nA||10 nA||150 nA|
|Photosensitive area (Detector)||φ0.1 mm||φ0.3 mm||φ0.3 mm||φ0.3 mm|
|Note||Typ., Ta=25 ℃ unless otherwise noted||Typ., Ta=25 ℃ unless otherwise noted||Typ., Ta=25 ℃ unless otherwise noted||Typ., Ta=25 ℃ unless otherwise noted|
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