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X-ray Direct CCD camera



C8000-30D is the structure which is irradiated EUV and soft X-ray photons in the CCD directly without using scintillator. Many electrons are generated into CCD by irradiating high energy photons, so high sensitive detection is realized.
The energy range of 20 eV to 10 keV is covered by back illuminated CCD.

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  • X-ray microscope
  • X-ray spectroscopy
  • Micro-CT
  • EUV lithography
  • X-ray energy analysis

Application examples

c8000-30D Application examples1

X-ray transmission of a bee captured directly with CCD

Resolution and dynamic range are significantly improved over a conventional X-ray imaging method.

c8000-30D Application examples2

Human HeLa cells

λ=15 Å (826.6 eV), Pinhole: 1 μm, Pre-pinhole: 100 μm

*Photo courtesy of Prof. Ito, Department of Nuclear Engineering, School of Engineering, Tokai University, Japan

c8000-30D Application examples3

Fe-55 Single Pixel Event (3 % extraction)



Type number C8000-30D
Imaging device Back-thinned frame transfer CCD
Effective no. of pixels 640 (H)×480 (V)
Cell size 14 μm (H)×14 μm (V)
Effective area 8.96 mm×6.72 mm
Full well capacity 30 000 electrons
Readout speed 31.4 frames/s
Readout noise 100 electrons (typ.)
Cooling temperature +5 ℃ (Ambient temperature: +20 ℃)
Interface Camera Link
A/D converter 12 bit


c8000-30D dimensional outline

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