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FLAT EXCIMER EX-400

L11751-01

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Use of a flat long lamp and RF (radio frequency) discharge delivers stable output with uniform irradiation over a large area and less flickering. The EX-400 ensures highly accurate, high quality modification, cleaning, and bonding compared to corona discharge method, plasma method, and even other excimer lamps.

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Installation example

Installation example

Specifications

EXCIMER LAMP L11751-01

Parameter Description / Value Unit
Rating 180 W
Emission wavelength 172 nm
Irradiance *1 Typ. 65 mW/cm2
Lamp design life 2000 h
Operating / storage temperature range +5 to +35 / -25 to +55
Operating / storage humidity range 30 to 80 / below 80 (no condensation) %
Weight 220 g

*1: Value calculated on the assumption that the irradiance is measured with a Hamamatsu UV power meter C9536/H9535-172 placed in the immediate vicinity of the lamp.

LAMP HOUSE FOR EXCIMER LAMP E12499

Parameter Description / Value Unit
Irradiation area (W × H) 400 × 38 mm
Cooling method Forced-air cooling by duct -
Duct suction air flow rate *2 0.35 ± 0.08 m3/min
Operating / storage temperature range +5 to +35 / -25 to +55
Operating / storage humidity range 30 % to 80 / below 80 (no condensation) %
Weight 10.3 kg

*2: Air flow rate in exhaust duct for lamp cooling

Dimensional outlines (Unit mm)

LAMP HOUSE FOR EXCIMER LAMP E12499

Dimensional outline

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