Optical NanoGauge 膜厚計
|測定膜厚範囲 （ガラス）||20 nm～50 μm*1|
|測定再現性 （ガラス）||0.02 nm*2*3|
|測定精度 （ガラス）||±0.4 ％*3 *4|
|測定波長範囲||400 nm～1100 nm|
|スポットサイズ||φ8 μm～φ80 μm*3|
|ワーキングディスタンス||17.0 mm （レンズ倍率：50倍、スポットサイズ：φ8 μm）*3|
|電源||AC100 V～AC120 V、50 Hz/60 Hz|
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