マイクロPMTは4つの要素技術を掛け合わせたことで生まれた量産対応が可能な光電子増倍管です。
通常、光電子増倍管の製造には多くの部品と工程が必要になりますが、マイクロPMTは半導体製造技術の応用によって、工程や部品の大幅な簡略化に成功しました。
検出器の構成は、2枚のガラスと1枚のシリコンからなる3層構造となっており、その加工にもMEMS技術を用いることで、手作業工程を大幅に削減しています。一方で動作原理は従来と全く変わらないため、通常の光電子増倍管が持つ高い感度はそのままマイクロPMTでも実現しています。
MEMS技術を用いたシリコンの深掘り加工技術を応用することで、光電子増倍管が持つ電極の具現化に成功しました。
真空中を運動する電子の軌道を可視化する独自技術によって、収集効率とゲイン(増倍率)を高い次元で両立しています。
管体製造のプロセス設計を独自に構築したことで、従来の光電子増倍管と同等の特性を持つ光電面の成膜を実現しました。
これまで培ってきた電子管事業部の真空気密パッケージ技術を用いることで、従来の光電子増倍管と同等の特性を実現しました。
マイクロPMTのサイズは幅10 mm×奥行11 mm×高さ2 mm※となっており、世界で最小、最薄、最軽量の光電子増倍管です。 このサイズで通常の光電子増倍管と同等の検出能力を有しているため、高性能装置の小型化に貢献できます。
※ パッケージ化前の真空管としてのサイズ
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