Optical MicroGauge 厚み計
|測定膜厚範囲 （ガラス）||25 μm～2900 μm*1|
|測定膜厚範囲 （シリコン）||10 μm～1200 μm*2|
|測定再現性 （シリコン）||100 nm*3|
|測定精度 （シリコン）||±0.5 μm（500 μm未満）、±0.1 %（500 μm以上）*3|
|インターフェース||USB 2.0 （本体 - PC間）|
|電源||AC100 V～AC240 V、50 Hz/60 Hz|
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