MEMS-FPI分光センサは、印加電圧により透過波長を可変できるMEMS-FPI (Fabry-Perot Interferometer: ファブリペロー干渉計)チューナブルフィルタとInGaAs PINフォトダイオードを1パッケージに収めた超小型センサです。感度波長範囲は1550～1850 nmであり、プラスチックや溶液中の物質の識別用などの小型機器への組み込みに適しています。
|波長分解能 (半値幅) max.||20 nm|
|暗電流 max.||40 nA|
|備考||指定のない場合はTyp. Ta=25 ℃|
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