Optical NanoGauge Thickness measurement system
The Optical NanoGauge Thickness measurement system C10323 is a microscopic thickness measurement systems. Objects with irregular surfaces that would produce high level of scattered light cannot be measured at the macro level. For these types of objects, measuring a small area reduces scattered light making measurement possible.
The power supply voltage of C10323-02 is AC100 V to AC120 V.
|Measurable film thickness range (glass)||20 nm to 50 μm①|
|Measurement reproducibility (glass)||0.02 nm②|
|Measurement accuracy (glass)||±0.4 %③|
|Light source||Halogen light source|
|Measurement wavelength||400 nm to 1100 nm|
|Spot size||φ8 μm to φ80 μm④|
|Working distance||Refer to objective lens list|
|Number of measurable layers||Max. 10 layers|
|Analysis||FFT analysis, Fitting analysis, Optical constant analysis|
|External control function||RS-232C, PIPE, Ethernet|
|Power supply||AC100 V to AC120 V, 50 Hz/60 Hz|
|Power consumption||Approx. 250 VA|
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