Optical NanoGauge Thickness measurement system


The Optical NanoGauge Thickness measurement system C10323 is a microscopic thickness measurement systems. Objects with irregular surfaces that would produce high level of scattered light cannot be measured at the macro level. For these types of objects, measuring a small area reduces scattered light making measurement possible.

The power supply voltage of C10323-02 is AC100 V to AC120 V.


  • Thickness measurement in micro field of view
  • High speed and high accuracy
  • Analyze optical constants (n, k)
  • External control available


Type number C10323-02
Measurable film thickness range (glass) 20 nm to 50 μm
Measurement reproducibility (glass) 0.02 nm
Measurement accuracy (glass) ±0.4 %
Light source Halogen light source
Measurement wavelength 400 nm to 1100 nm
Spot size φ8 μm to φ80 μm
Working distance Refer to objective lens list
Number of measurable layers Max. 10 layers
Analysis FFT analysis, Fitting analysis, Optical constant analysis
External control function RS-232C, PIPE, Ethernet
Interface USB 2.0
Power supply AC100 V to AC120 V, 50 Hz/60 Hz
Power consumption Approx. 250 VA
① When converted with the refractive index of glass = 1.5.
② Standard deviation (tolerance) when measuring 400 nm thick glass film.
③ Depending on optical system or objective lens magnification to be used.
④ Range of measurement guarantee as recorded in the VLSI Standards measurement guarantee document.


c10323 dimensional outline



a10406-02 dimensional outline

a10407-01 dimensional outline



a10407-02 dimensional outline

l6758-11 dimensional outline


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