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Structure and principle | MEMS mirrors


Structure and principle

In a MEMS mirror, a metallic coil is formed on a single-crystal silicon, a mirror is formed inside the coil through MEMS processing, and a magnet is arranged beneath the mirror. Within a magnetic field generated by the magnet, electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that causes the mirror to tilt. In addition, the mirror can be driven two-dimensionally with the combination of two springs formed by MEMS processing. The path of the laser light incident on the mirror surface is varied in this way to scan and project. Compared to the electrostatic or piezoelectric driven mirrors, electromagnetically driven MEMS mirrors are lower voltage driven and easier to use.

Structure diagram

Electromagnetic MEMS mirror features (comparison to galvano mirror)

MEMS mirrors are smaller, have dual-axis capability and lower cost compared to galvano mirrors.
Hamamatsu MEMS mirrors have adopted electromagnetic drive based on MEMS and opto-semiconductor technologies.

Parameter MEMS mirror (Electromagnetic) Galvano mirror
Drive method Electro-magnetic (Lorentz force) Motor (Lorentz force)
Optical deflection angle Limited Large
Mirror size Small Large
Size Very small Bulky
Cost Low High
Dual-axis compatibility Possible by 1 unit Requiring 2 units
Operation Complex Not complex

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