iPHEMOS-MPX Inverted emission microscope
The iPHEMOS-MPX is a high-resolution emission microscope that pinpoints failure locations in semiconductor devices by detecting the weak light emissions and heat emissions caused by defects.
Possible to support multiple analyses with one unit. Applicable light sources; 1.3 μm, 1.1 μm, 532 nm
Optical stage with linear scales improves position accuracy.
Die to die index movement and probing are available by a semi-auto prober with wafer mapping software, which improves analysis efficiency, and save time.
|Dimensions*1/Weights*2||Main unit: 1654 mm (W)×1541 mm (H)×1200 mm (D), Approx. 1100 kg
System rack: 880 mm (W)×1841.5 mm (H)×715 mm (D), Approx. 300 kg
Operation desk*3: 1200 mm (W)×700 mm (H)×700 mm (D), Approx. 45 kg
|Line voltage||Single phase 200 V to 240 V|
|Power consumption||Approx. 3300 VA|
|Vacuum||80 kPa or more|
|Compressed air*4||0.5 MPa to 0.7 MPa|
*1: Excluding projecting parts
*2: Include a sample stage
*4: Include a regular
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