The S13124-01 is an electromagnetically driven mirror that incorporates our unique MEMS (micro-electro-mechanical systems) technology. The device was made smaller by arranging the magnet beneath the mirror. A two-dimensional scanning was achieved in linear mode. Electrical current ﬂowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that drives the mirror. Hamamatsu MEMS mirrors oﬀer a wide optical deﬂection angle and high mirror reﬂectivity.
|Type||2-axis linear scan|
|Operation mode||First axis: Linear mode
Second axis: Linear mode
|Mirror size||φ1.95 mm|
|Optical deflection angle||First axis: ±10°
Second axis: ±10 °
|Drive frequency (max.)||First axis: 90 Hz
Second axis: 90 Hz
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