The S8553 is a VUV (Vacuum UV) photodiode suitable for detection of ArF excimer lasers (λ=193 nm). Designed to provide optimal performance in the VUV range, this photodiode offers more stable sensitivity even after long exposure to VUV radiation compared with conventional types.
|Photosensitive area||18 × 18 mm|
|Number of elements||1|
|Reverse voltage (max.)||5 V|
|Photosensitivity (typ.)||0.06 A/W|
|Dark current (max.)||5000 pA|
|Rise time (typ.)||18 μs|
|Terminal capacitance (typ.)||8000 pF|
|Measurement condition||Typ. Ta=25 ℃, unless otherwise noted, Photosensitivity: λ=193 nm|
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