LCOS-SLM (optical phase modulator) X15213 series

LCOS-SLM are reflective space light phase modulators that freely modulates light phases. Laser or other irradiation light goes through a phase modulation by the liquid crystal and reflected. The wavefront shape can be controlled freely. Wavefront control of the light can be applied to optical beam photolithography, aberration correction, and the like.

The X15213 series offers an extensive lineup to meet the needs of various wavelengths. All types have a glass substrate with an anti-reflection coating and a CMOS chip with a mirror.

Recommended beam diameter (1/e2) is 8 mm or more.


●Aluminum mirror type (-01/-07/-08)

The aluminum mirror type uses the reflection from the aluminum electrode on the CMOS chip and has a wide reflection band, so it

can be used in a wide wavelength range.

●Dielectric multilayer mirror type (-02/-03B/-05/-12/-13/-15/-16/-19)

The dielectric multilayer mirror type has a specially designed dielectric multilayer film on the surface of the CMOS chip to support

laser light sources of various wavelengths. Compared to the aluminum mirror type, the higher reflectivity achieved by the dielectric

mirror decreases the internal absorption rate. High light utilization efficiency can be realized.

●Water-cooled type (-02L/-02R/-03BL/-03BR/-12L/-12R/-15L/-15R/-16L/-16R/-19L/-19R)

The dielectric multilayer mirror type head with a built-in water-cooled heat sink suppresses temperature rise due to laser irradiation

and achieves high power handling capavility.

●Sapphire type (-03CR/-03CL)

In addition to the water-cooled heat sink, sapphire glass is used for the glass substrate. As a result, the heat dissipation efficiency

has been improved, leading to power handling capability of over 700 W.

Wavelength range


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