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Applications | Terahertz (THz) sensors
A THz detection device enables high-sensitivity THz analysis when combined with a high-intensity THz wave pulse light source.
Here, we introduce some examples of measurements that are expected to be applied.
Application examples utilizing the strengths of the detector
Detector strengths
- High-speed response
- Micro-change measurement
- Wide effective area
Gas measurement
The THz wave region has a fingerprint spectrum for various gases and is expected to be applied to various gas analyses. By using the non-linear response characteristics of the THz-PMT, gas can be detected with higher sensitivity compared with general detectors.
In this example, N2O gas was analyzed using a THz PMT and a thermal detector. It can be seen that the gas absorption can be detected with higher sensitivity compared with a thermal detector.
THz wave absorption characteristics of N2O gas
In this example, N2O gas was analyzed using a THz PMT and a thermal detector. It can be seen that the gas absorption can be detected with higher sensitivity compared with a thermal detector.
Measurement system
Water vapor measurement
THz waves have strong absorption characteristics for water vapor. Therefore, by combining THz waves and the non-linear response characteristics of the THz-PMT, it is possible to detect trace amounts of water vapor with high sensitivity.
This system is expected to be introduced to the management of various production processes where water vapor contamination is undesirable.
THz wave absorption characteristics of water vapor
Measurement system
Semiconductor inspection
THz waves exhibit unique reflection characteristics for semiconductors. By using this principle, it may be possible to measure the electrical properties of semiconductor surfaces without contact.
In this case, the reflection response characteristics of a silicon wafer according to its resistivity were measured using a THz PMT and a thermal detector.
The THz PMT can detect with high sensitivity slight changes in the resistivity on the surface of the silicon wafer, which are difficult to distinguish with a thermal detector.
Relationship between electrical resistivity of Si ρ and reflectance spectrum (color)
Measurement system
Evaluation of THz wave reflectance spectrum of Si wafers with different resistivity
The measurement results shown on this page are the result of joint research between RIKEN and the Technical University of Denmark.
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