MEMS-FPI spectrum sensor

C13272-03

Ultra-compact near infrared spectrum sensor that integrates MEMS tunable filter and photosensor (1550 to 1850 nm)

 

The MEMS-FPI spectrum sensor is a ultra-compact sensor that houses a MEMS-FPI (Fabry-Perot Interferometer) tunable filter that can vary its transmission wavelength depending on the applied voltage and InGaAs PIN photodiode in a single package. The spectral response range is 1550 to 1850 nm. It is suitable for installation in simple, compact instruments for measuring material absorbance and the like.


Features
- Built-in Hamamatsu InGaAs PIN photodiode single element chip
- Spectral response range: 1550 to 1850 nm
- Ultra-compact: TO-5 package
- Ultra light: 1 g
- Hermetically sealed package: high reliability under high humidity
- Built-in thermistor
- Built-in band-pass filter for cutting off wavelengths outside the spectral response range

Measurement examples

Spectral measurement of plastics

A demonstration module with a built-in MEMS-FPI spectrum sensor and near infrared light source measured the reflection spectrum of the plastics. From the spectrum obtained, it is possible to distinguish the component of plastic.

Spectral measurement of textiles

A demonstration module with a built-in MEMS-FPI spectrum sensor and near infrared light source measured the reflection spectrum of the textiles. From the spectrum obtained, it is possible to distinguish the component of clothing fabric.

Specifications

Type number

C13272-02

C13272-03

C13272-02

C13272-02

C14272

C14272

C14273

C14273

Spectral response range 1550 to 1850 nm 1550 to 1850 nm 1350 to 1650 nm 1750 to 2150 nm
Spectral resolution (FWHM) max. 20 nm 20 nm 18 nm 22 nm
Dark current max. 100 nA 40 nA 10 nA 150 nA
Photosensitive area (Detector) φ0.3 mm φ0.1 mm φ0.3 mm φ0.3 mm
Band-pass filter integrated integrated integrated integrated
Package TO-5 TO-5 TO-5 TO-5
Note Typ., Ta=25 ℃ unless otherwise noted Typ., Ta=25 ℃ unless otherwise noted Typ., Ta=25 ℃ unless otherwise noted Typ., Ta=25 ℃ unless otherwise noted

Dimensional outline (unit: mm)

Related documents

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