Dual PHEMOS-X Emission microscope

C16506-01

Failure analysis from both sides is possible with one unit

The Dual PHEMOS-X is designed for advanced, 3D, nontransparent devices where simultaneous optical FA may be required from both sides (top and bottom) at the wafer or die level.

Features

Dual side analysis

Easy to change between top and bottom side FA without moving your device to another system.

High accuracy stage designed for advanced devices

Working range of optical stage

  X Y Z
Top side 40 mm 40 mm 80 mm
Bottom side 60 mm 60 mm 20 mm

* Working range might be narrower than these values due to the prober being used and interference with the sample stage or mounting of a NanoLens.

Sample stage (Semiauto prober MPd-1000X C16688-01)

Main function

• XY stage control

• Z, Theta control

X 300 mm
Y 300 mm
Z 22.5 mm
θ +/- 5°

• Wafer mapping function

• Alignment function

Basic display functions

Superimposed display/contrast enhancement function

* The actual display may differ depending on your software version, environment, etc.

The Dual PHEMOS-X superimposes the emission image on a high-resolution pattern image to localize defect points quickly. 

The contrast enhancement function makes an image clearer and more detailed.

 

Display function

  • Annotations: Comments, arrows, and other indicators can be displayed on an image at any location desired.
  • Scale display: The scale width can be displayed on the image using segments.  
  • Grid display: Vertical and horizontal grid lines can be displayed on the image.
  • Thumbnail display: Images can be stored and recalled as thumbnails. Image information such as stage coordinates can be displayed.
  • Split screen display: Pattern images, emission images, superimposed images, and reference images can be displayed in a 6-window screen at once.

Specifications

Dimensions/Weights

Main unit: 1900 mm (W) × 2200 mm (H) × 1350 mm (D) , Approx. 2335 kg

System rack: 1060 mm (W) × 1841.5 mm (H) × 715 mm (D) , Approx. 370 kg

Prober rack: 800 mm (W) × 1800 mm (H) × 650 mm (D) , Approx. 360 kg

Line voltage Single phase AC 200 V to AC 240 V    50 Hz/60 Hz
Power consumption Approx. 3300 VA (system rack) / Approx. 4400 VA (prober rack)
Vacuum -40 kPa to -80 kPa
Compressed air 0.5 MPa to 0.7 MPa

*1  Including a regulator

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