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MEMS mirror



Ultra-miniature, high performance
Electromagnetically driven laser scanning MEMS mirror

The S12237-03P is an electromagnetically driven mirror that incorporates our unique MEMS (micro-electro-mechanical sys-tems) technology. We achieved an ultra-miniature scale by mounting the magnet beneath the mirror. Within a magnetic field generated by the magnet, electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that drives the mirror. Hamamatsu MEMS mirrors offer a wide optical deflection angle and high mirror reflectivity as low power consumption.

- Low current operation
- Ultra-miniature size
- Wide optical deflection angle

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Type 1-axis linear scan
Operation mode Linear mode
Mirror size φ2.6 mm
Mirror material Aluminium
Optical deflection angle ±15 °
Drive frequency (max.) 100 Hz

Dimensional outline (unit: mm)


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