The S13989-01H is an electromagnetically driven mirror that incorporates our unique MEMS (micro-electro-mechanical systems) technology. The device was made smaller by arranging the magnet beneath the mirror. High reliability was achieved by employing a hermetic seal package. Electrical current ﬂowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that drives the mirror. Hamamatsu MEMS mirrors offer a wide optical deﬂection angle and high mirror reﬂectivity.
|Type||2-axis raster scan|
|Operation mode||Fast axis: Non-linear mode (resonant mode)
Slow axis: Linear mode
|Mirror size||φ1.23 mm|
|Optical deflection angle||Fast axis: ±20°
Slow axis: ±12 °
|Drive frequency (max.)||Fast axis: 29.3 kHz (typ.)
Slow axis: 100 Hz
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