QPM Optical Module

C16999-30

In-line compatible high-speed interference microscopy to detect surface defects(Ultra-low magnification model)

This is an optical module for building interference microscope, "QPM (Quantitative Phase Microscopy)" which provides nano-scale vertical resolution. Our proprietary technology enables a compact and lightweight module that is capable of high-speed and real-time measurement.

C16999-30 is an ultra-low magnification model specifically designed for 1.25x objective lense.

Features

  • Compact and lightweight
  • Compatible with in-line configuration (for embedded applications)
  • High-speed and real-time measurement
  • Reduced total cost
  • Ultra-low magnification types specifically designed for x 1.25 objective lense

Specifications

Parameters High magnification model Low magnification model Ultra-low magnification model Unit
C16999-10 C16999-20 C16999-30
Objective lens (sold separately) A17086-10 A17086-20 A17086-30 A17086-40 A17086-50 A17086-60 A17086-70
Lens magnifications x 20 x 10 x 5 x 10 x 5 x 2 x 1.25 -
Vertical resolution*1 0.5 nm or less nm
Horizontal resolution 0.72 1.1 2.2 1.1 2.2 4.1 8.1 μm
Field of view 0.707 × 0.517 1.41 × 1.04 2.83 × 2.07 1.41 × 1.04 2.83 × 2.07 7.07 × 5.17 11.3 × 8.28 mm
QPM image acquistion rate*2 25 fps
Z measurement range ±1.3 ±3 ±12 ±3 ±12 ±12 ±15 μm
W.D. 3.1 11 20 11 20 6.2 5 mm

*1  Reproducibility of the optical path length measured for the level difference on a height-standard test chart.

*2  When shooting ato a camera frame rate of 200 fps

*  The specifications are the optical performance when using each objective lens combined by our recommended camera and our recommended lens tube.

Dimensions

Representative example:QPM optical module C16999-10 + Objective lens A17086-20

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