The S14124-20 is an improved Si APD from the S8664 series for high sensitive detection of light with a wavelength of 266 nm used in semiconductor inspection and laser processing equipment. We have achieved a quantum efficiency of 87% at λ=266 nm.
- High sensitivity, quantum efficiency: 87% (λ=266 nm)
- Low capacitance
- Low noise
- High gain
|Type||Short wavelength type
(low terminal capacitance)
|Photosensitive area||φ2.0 mm|
|Peak sensitivity wavelength (typ.)||600 nm|
|Dark current (max.)||10 nA|
|Cutoff frequency (typ.)||250 MHz|
|Terminal capacitance (typ.)||11 pF|
|Breakdown voltage (typ.)||400 V|
|Temperature coefficient of breakdown voltage (typ.)||0.78 V/℃|
|Measurement condition||Typ. Ta=25 ℃, unless otherwise noted|
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