The Optical NanoGauge Thickness measurement system C13027 is a non-contact film thickness measurement system utilizing spectral interferometry. The C13207 not only supports PLC connections but is also designed more compact than our other models for easy installation into equipment. Our Optical Gauge series is capable of measuring the thickness of extremely thin films down to 10 nm as well as covering a wide range of film thickness from 10 nm up to 100 μm. The Optical Gauge series also makes rapid measurements up to 200 Hz and so is ideal for measurements on high-speed production lines.
|Measurable film thickness range (glass)||10 nm to 100 μm*1|
|Measurement reproducibility (glass)||0.02 nm*2 *3|
|Measurement accuracy (glass)||±0.4 %*3 *4|
|Light source||Halogen light source|
|Measurement wavelength||400 nm to 1100 nm|
|Spot size||Approx. φ1 mm*3|
|Working distance||10 mm*3|
|Number of measurable layers||Max. 10 layers|
|Analysis||FFT analysis, Fitting analysis, Optical constant analysis, Color analysis|
|Measurement time||3 ms/point*5|
|Fiber connector shape||FC|
|External control function||RS-232C, Ethernet|
|Power supply||AC100 V to AC240 V, 50 Hz/60 Hz|
|Power consumption||Approx. 80 VA|
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