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Key challenges | Thickness measurement system
Key challenges in thickness measurement systems
There are several challenges associated with implementing thickness measurement systems, such as complex system design and cumbersome installation and maintenance tasks. These challenges can lead to reduced production efficiency and increased costs.
One effective approach to addressing these issues is to use measurement systems with low sensitivity to angular variations and defocus. Hamamatsu Photonics minimizes angle and defocus dependency in its thickness measurement systems, thereby contributing to simplified system design and reduced installation and maintenance workload.
This page introduces the differences in angle and defocus dependency between standard thickness measurement systems and those developed by Hamamatsu Photonics.
Angle dependency
Angle dependency refers to the influence that variations in the angle of incident light relative to the surface of the measurement target have on the measurement results in film thickness evaluation. When the angle of incidence changes, the reflection and transmission characteristics of light also change, which can affect the intensity and phase information of the detected signal. As a result, the same film thickness may yield different measurement results under varying incident angles.
Hamamatsu Photonics’ thickness measurement systems exhibit low angle dependency, providing the advantage of maintaining measurement accuracy even with slight angular deviations.
Example: 700 nm glass sample
The Optical NanoGauge enables measurement with a variation as small as 0.39 nm (0.047%) within an angular variation of 0° to 5°.
Fig 1. Effect of angular differences on measurement
Defocus dependency
Defocus dependency refers to the influence that the focus condition of the optical system has on film thickness measurement results. When the surface of the measurement target deviates from the focal plane of the optical system, the contrast and resolution of the acquired image or signal may deteriorate, potentially affecting measurement accuracy. This effect becomes particularly significant when measuring fine structures or extremely thin films.
Hamamatsu Photonics’ thickness measurement systems do not employ lens-based focusing optics, which results in significantly reduced variation in measurement results caused by height deviations compared to standard film thickness measurement instruments.
Example: 700 nm glass sample
The Optical NanoGauge enables measurement with a variation below 0.1 nm within a defocus (height displacement) of ±3 nm.
Fig 2. Effect of defocus differences on measurement
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