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Pulsed Solid State Laser
L11564-03
This is a solid state nanosecond pulsed laser with stability and ease of maintenance needed for industrial applications. This unit is specifically designed to be built into equipment. Even when the output power of the pump laser diode becomes low due to the end of its service life, it can be easily replaced without removing the laser head from the equipment, so maintenance is easy. This laser also has a useful function that varies the pulse waveform to adapt to the processing conditions.
Features
- Wavelength: 1342 nm
- Average output power: 11 W (max.)
- Excellent spatial mode: TEM00
- High beam quality: M2 < 1.1
- Pulse mode: Normal mode or waveform control mode
- Pulse width: 35 ns to 700 ns (depending on repetition rate)
Applications
- Trimming
- Ablation processing (repair)
- Backside processing of Si wafer
- Scribing
Specifications
| Parameter | Value |
|---|---|
| Wavelength | 1342 nm |
| Average output power (max.) | 11 W |
| Repetition rate | 90 kHz |
| Pulse width *1 | 82 ns±7 ns |
| Repetition rate variable range | 60 kHz to 120 kHz |
| Pulse peak-stability *2 | 10 % |
| Average power stability *3 | ±2 % (RMS) |
| Spatial mode *1 | TEM00 |
| Beam waist diameter *4 | φ510 μm±10 % |
| Beam waist position *4 | 150 mm±20 mm inside the head from the optical reference point |
| Polarization | Vertical (polarization factor >100 : 1) |
| Operation mode *5 | Pulse and CW |
| Regulation mode | ACC and APC |
| Interlock functioning *6 | Available |
| Solid state laser head dimensions (W × H × D) *7 | 282 mm × 60 mm × 120 mm |
| Solid state laser head weight*8 | Approx. 3.5 kg |
| Laser controller dimensions (W × H × D) *9 | 426 mm × 176 mm × 450 mm |
| Laser controller weight | Approx. 23.8 kg |
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