RF electric discharge type excimer lampxenon lamp RF electric discharge type excimer lampxenon lamp

Excimer lamp light sources

Excimer lamp light sources contribute to surface modification, dry cleaning, oxidative decomposition, TOC measurement, and VOC decomposition.

The optimum product can be selected based on the product size and irradiation area.

This excimer lamp light source achieves uniform irradiation over a large area and stable output with little flickering by employing a flat lamp and RF (radio frequency) discharge. Compared to the conventional corona discharge and plasma systems, it is damage-free and generates no dust.

This is the world's smallest class excimer lamp designed for easy assembly into equipment. Its compact size and light weight allow a free and flexible design to achieve equipment downsizing and higher performance.

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