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FLAT EXCIMER
EX-86U
The all-in-one design with a compact, lightweight, and built-in power supply enables easy introduction into the manufacturing process, regardless of the installation location.
Specifications
Excimer lamp light source L13129-□□ (*1)
| Items | Description / Value | Unit | ||
|---|---|---|---|---|
| Window material | Quartz glass | － | ||
| Irradiation window size | 86 × 40 | nm | ||
| Peak wavelength | 172 | nm | ||
| UV irradiance (*2) | Min. | 50 | mW/cm2 | |
| Lamp guaranteed life (*3) | 1000 | h | ||
| Lamp design life | 2000 | h | ||
| Replacement lamp (sold separately) | L12681 | － | ||
| Input voltage (AC) | 100 V to 240 V, single-phase 50 Hz / 60 Hz | － | ||
| Power consumption | Max. | 150 | VA | |
| Cooling method | Forced air cooling with built-in fan | － | ||
| Operating temperature range | +5 ℃ to +35 ℃ | － | ||
| Storage temperature range | -5 ℃ to +55 ℃ (no freezing) | － | ||
| Operating humidity range | 30 % to 80 % (no condensation) | － | ||
| Storage humidity range | 80 % or below (no condensation) | － | ||
| External control | Lighting control, lighting signal, various alarms/error signals | － | ||
| Communication control | Lighting control, lighting signal, cumulative lighting time display, various alarms/error signals | － | ||
| Applicable standards | EMC standards | IEC 61326-1 Emission limits: CISPR 11 Group 2 Class A Immunity requirements: Table 2 |
－ | |
| Safety standards | IEC 61010-1/A1 | |||
| IEC 62471 Risk Group 2 | ||||
*1: The “□” part of the model’s name is a suffix for each AC cable specification.
C1: For Japan / C2: For the United States / C3: For Europe
*2: Value measured by Hamamatsu UV power meter C9536, H9535-172 at the nearest position to the lamp.
*3: The lifetime is defined as the point at which the UV irradiance drops to 70 % of the initial value or when the lamp stops lighting.
Dimensional outlines (Unit: mm)
Excimer lamp light source L13129 series
External control connector (15-pin D-sub) connection
| Pin No. | Signal | |
|---|---|---|
| 1 | Manual irradiation |
Input |
| 2 | Manual irradiation lighting control signal (-) |
Input |
| 3 | Auto irradiation lighting control signal (+) |
Input |
| 4 | Auto irradiation lighting control signal (-) |
Input |
| 5 | Lighting signal | Output |
| 6 | Error signal | Output |
| 7 | No connection | ー |
| 8 | No connection | ー |
| 9 | Output voltage (+24 V) | Output |
| 10 | Output voltage (+24 V) | Output |
| 11 | Output voltage (+24 V) | Output |
| 12 | GND. | ー |
| 13 | GND. | ー |
| 14 | GND. | ー |
| 15 | GND. | ー |
Accessories
- AC cable (2 m)
- Confirmation
-
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