FLAT EXCIMER

EX-86U

The all-in-one design with a compact, lightweight, and built-in power supply enables easy introduction into the manufacturing process, regardless of the installation location.

Specifications

Excimer lamp light source L13129-□□ (*1)

Items Description / Value Unit
Window material Quartz glass
Irradiation window size 86 × 40 nm
Peak wavelength 172 nm
UV irradiance (*2) Min. 50 mW/cm2
Lamp guaranteed life (*3) 1000 h
Lamp design life 2000 h
Replacement lamp (sold separately) L12681
Input voltage (AC) 100 V to 240 V, single-phase 50 Hz / 60 Hz
Power consumption Max. 150 VA
Cooling method Forced air cooling with built-in fan
Operating temperature range +5 ℃ to +35 ℃
Storage temperature range -5 ℃ to +55 ℃ (no freezing)
Operating humidity range 30 % to 80 % (no condensation)
Storage humidity range 80 % or below (no condensation)
External control Lighting control, lighting signal, various alarms/error signals
Communication control Lighting control, lighting signal, cumulative lighting time display, various alarms/error signals
Applicable standards EMC standards IEC 61326-1
Emission limits: CISPR 11 Group 2 Class A
Immunity requirements: Table 2
Safety standards IEC 61010-1/A1
IEC 62471 Risk Group 2

*1: The “□” part of the model’s name is a suffix for each AC cable specification.

   C1: For Japan / C2: For the United States / C3: For Europe

*2: Value measured by Hamamatsu UV power meter C9536, H9535-172 at the nearest position to the lamp.

*3: The lifetime is defined as the point at which the UV irradiance drops to 70 % of the initial value or when the lamp stops lighting.

Dimensional outlines (Unit: mm)

Excimer lamp light source L13129 series

External control connector (15-pin D-sub) connection

Pin No. Signal
1

Manual irradiation
lighting control signal (+)

Input
2 Manual irradiation
lighting control signal (-)
Input
3 Auto irradiation
lighting control signal (+)
Input
4 Auto irradiation
lighting control signal (-)
Input
5 Lighting signal Output
6 Error signal Output
7 No connection
8 No connection
9 Output voltage (+24 V) Output
10 Output voltage (+24 V) Output
11 Output voltage (+24 V) Output
12 GND.
13 GND.
14 GND.
15 GND.

Accessories

  • AC cable (2 m)

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