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VUV light source unit
L15094
The L15094 is a high output model using a high power deuterium lamp we manufacture in-house.
In addition to high stability and a long life, the L15094 delivers performance maximized for electrostatic charge elimination, making it effective in removing static electricity from objects having large electrostatic charges or objects moving at high speed. The L15094 also helps shorten the time required for electrostatic charge removal to improve the throughput. The L15094 efficiently ionizes residual atoms and molecules in a vacuum (depressurized state) to create an ion-rich environment.
Specifications
| Parameter | Description | Unit | ||
|---|---|---|---|---|
| Window material | MgF2 | － | ||
| Spectral distribution | 115 to 400 | nm | ||
| Preheating time | 25 ±5 | s | ||
| Light output stability | Fluctuation (p-p) | Max. | 0.05 | % |
| Drift | Max. | ±0.3 | %/h | |
| Guaranteed lamp life (*1) | 1000 | h | ||
| Replacement lamp | L15294 | － | ||
| Vacuum flange | － (*2) | － | ||
| Sealing method | O-ring | － | ||
| Leakage amount | 1 x 10-10 Pa m3/s (*3) | － | ||
| Input voltage (AC) | 100 V to 240 V, single phase 50 Hz / 60 Hz | － | ||
| Power consumption | Max. | 200 | VA | |
| Light source unit cooling method | Forced air cooling by fan | － | ||
| Operating temperature range | +10 to +40 | ℃ | ||
| Storage temperature range | 0 to +60 | ℃ | ||
| Operating humidity range | Below 80 % (no condensation) | － | ||
| Storage humidity range | Below 85 % (no condensation) | － | ||
| External control | Irradiation control, irradiation signal, various error signals | － | ||
*1: The life end is defined as the time when light output at 230 nm falls below 50 % of its initial value or when light output fluctuation exceeds the maximum specification value.
Note that light output attenuation is highly dependent on the condition of the vacuum equipment.
*2: The L15094 can be used with vacuum flanges listed below as related products.
Please contact us for information on how to install a VUV Ionizer onto vacuum equipment.
*3: Result measured with helium leak detector.
Characteristics
Neutralization performance (Typ.)
Neutralization time vs. distance
Neutralization time vs. vacuum level
Directivity (light distribution) (Typ.)
Light irradiation range (Typ.)
Installation example
Dimensional outlines (Unit: mm)
Light source unit (Weight: Approx. 1.3 kg)
Power supply unit (Weight: Approx. 2.8 kg)
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