The S12237-03P is an electromagnetically driven mirror that incorporates our unique MEMS (micro-electro-mechanical sys-tems) technology. We achieved an ultra-miniature scale by mounting the magnet beneath the mirror. Within a magnetic field generated by the magnet, electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that drives the mirror. Hamamatsu MEMS mirrors offer a wide optical deflection angle and high mirror reflectivity as low power consumption.
|Type||1-axis linear scan|
|Operation mode||Linear mode|
|Mirror size||φ2.6 mm|
|Optical deflection angle||±15 °|
|Drive frequency (max.)||100 Hz|
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