Si photodiode array
|Photosensitive area||14 x 14 mm|
|Number of elements||4|
|Incident electron energy range (typ.)||1 to 30 keV|
|Electron multiplying gain (typ.)||300|
|Reverse voltage (max.)||20 V|
|Dark current (max.)||60000 pA|
|Cutoff frequency (typ.)||5 MHz|
|Terminal capacitance (typ.)||200 pF|
|Measurement condition||Ta=25 ℃, VR=5 V|
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