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Si photodiode
S8553
Vacuum UV (VUV) monitoring photodiodes
S8553 have sensitivity in the vacuum UV region. It is specially suitable for excimer laser (ArF: 193 nm, KrF: 248 nm) monitoring.
Its design optimized for use in the VUV region provides improved stability in sensitivity for VUV light irradiation compared to previous products.
Features
- Improved reliability for excimer lasers (ArF: 193 nm, KrF: 248 nm)
- Large photosensitive area: 18 × 18 mm
- Windowless package: 25.5 × 25.5 mm ceramic package
Notice
The chip of this product is not sealed and is exposed.
Parts such as electrodes on the chip are not protected by an enclosure or window and so require especially strict care during handling compared to ordinary products.
Before using this product, always read “Precautions / Unsealed products” described below.
Specifications
| Photosensitive area | 18 × 18 mm |
|---|---|
| Number of elements | 1 |
| Package | Ceramic |
| Cooling | Non-cooled |
| Reverse voltage (max.) | 5 V |
| Spectral response range | 190 to 1000 nm |
| Photosensitivity (typ.) | 0.06 A/W |
| Dark current (max.) | 5000 pA |
| Rise time (typ.) | 18 μs |
| Terminal capacitance (typ.) | 8000 pF |
| Measurement condition | Typ. Ta=25 ℃, Photosensitivity: λ=193 nm, unless otherwise noted |
Variation in sensitivity due to VUV exposure
Dimensional outline (unit: mm)
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