Si photodiode array

S10359

Highly reliable quadrant photodiode
for ArF excimer laser monitor

 

The S10359 is a quadrant Si photodiode that has achieved high reliability for ultraviolet light. It exhibits low sensitivity deterioration under UV light irradiation and is suitable for applications such as optical axis alignment or monitoring of intense UV light sources.

 

Features
- High reliability to ArF excimer laser radiation (λ=193 nm)
- No resin to cause outgassing
- Large active area: 10 × 10 mm/quadrant

 

Number of elements 4-segment
Package Metal
Cooling Non-cooled
Spectral response range 193 to 1000 nm
Peak sensitivity wavelength (typ.) 760 nm
Photosensitivity (typ.) 0.06 A/W
Dark current (max.) 500 pA
Rise time (typ.) 1 μs
Terminal capacitance (typ.) 500 pF
Measurement condition Typ. Ta=25 ℃, per one element (except for photosensitive area), unless otherwise noted,
Photosensitivity: λ=193 nm

Spectral response

Dimensional outline (unit: mm)

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