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LCOS-SLM (Optical phase modulator)

The LCOS-SLMs are reflective spatial light phase modulators that freely modulate optical phases and optical phase of laser is modulated by the liquid crystal. Wavefront control of the light can be applied to optical beam photolithography, aberration correction.

Product lineup

  • Aluminum mirror

This type of LCOS-SLM utilizes the reflection of light from aluminum pixel electrodes formed on the CMOS chip and has a wide reflection band, making it usable over a broad wavelength range.

  • Dielectric multilayer film mirror

This type has a dielectric multilayer film designed for specific laser wavelengths and formed on the pixel electrodes. Compared to the wide wavelength band type, it provides higher reflectivity to reduce the absorption of light inside the LCOS chip and in this way delivers excellent performance in light utilization efficiency and light resistance.

  • Dielectric multilayer film mirror and water-cooled heatsink

This type has a head designed for specific wavelengths and equipped with a water-cooled heatsink that suppresses temperature rises in the liquid crystal caused by laser irradiation to further improve the light resistance, making it compatible with high-power lasers.

  • Dielectric multilayer film mirror, water-cooled heatsink, and sapphire glass

Besides having a water-cooled heatsink, this type employs sapphire glass for the glass substrate to enhance the heat dissipation efficiency and boost the light resistance. This type is usable with lasers of 700 W or higher such as those used for metal processing tasks.

Special Site

For details on differences in mirrors, light resistance, and other aspects, please our special site. This site provides technical information, past research and development, and application examples that will help you understand spatial light control technology.

Supported wavelength range

*1: Less than 500 mW/cm2 per unit area is recommended.

*2: Recommended light intensity depends on the irradiation conditions, so please contact us for details.

Compact, low-cost version for installation into equipment

We also offer more compact and lower-cost versions available for each type of LCOS-SLM for installation into equipment. Please contact us for details.

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