Laser-Driven Light Source (LDLS)
The EQ-77-QZ-S is a high output power LDLS that produces radiance about 3 times higher than the standard model EQ-99X LDLS. To maintain its high output power, the lamphead requires nitrogen purging and connection to a water cooling chiller.
|Parameter||Description / Value||Unit|
|Optical interface①||Diverging beam (Single beam)||－|
|Wavelength range||170 to 2500||nm|
|Plasma size (FWHM)||Typ.||125 × 320||μm|
|Laser class||Class 1||－|
|Spectral radiance(at 500 nm)||Typ.||75||mW/㎟·sr·nm|
|Broadband optical power||Typ.||2.75||W|
|Output window size||Φ22||mm|
|Cooling method||Water cooling④⑤||－|
|Nitrogen purge||Required. Grade 4.8 or higher, filtered to 5 μm. 20 psiG ±2 psiG||－|
|Applicable standards||EN 61010-1
|Device configuration||Lamphead, Power supply controller, Necessary cables||－|
|Power rating||Input voltage (AC)||100 to 240||V|
|Power frequency||50 / 60||Hz|
① Dual-beam output mode can be selected as an option.
② Windows may need to be replaced depending on the extent of contamination and usage conditions.
③ YAG (190 nm to 2500 nm) and BK7 (350 nm to 2500 nm) windows are also selectable as options.
④ Cooling water conditions
Lamphead: ≥0.5 L/min, 18 °C to 30 °C, 100 psiG (0.69 MPa) max. inlet pressure
Controller: No cooling required
⑤ A chiller kit is available as an option.
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