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Applications | Laser-Driven Light Sources (LDLS)

UV-visible-near-infrared spectral measurement

Evaluation of optical products
(ex: filters, lenses)

Evaluation of material
(ex: jewels, plastics)

Application field: Semiconductor inspection

In semiconductor inspections, higher intensity UV light sources are required to further shorten the inspection time and improve accuracy in processes for inspecting patterns and thin films formed on wafers. There is also greater demand for UV light sources at shorter wavelengths to conform to future process shrinks in semiconductor device fabrication. The LDLS is an optimal light source that meets these needs because it provides excellent luminance over a broad spectral range along with a long service life.

Besides the LDLS, Hamamatsu Photonics and Energetiq offer a full line-up of high-performance light sources including extreme ultraviolet (EUV) light sources and xenon lamps to respond to constantly changing needs in the semiconductor inspection equipment market.

  • Film thickness measurement
  • Substrate coating inspection
  • Deposition measurement

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