VUV Ionizers are electrostatic charge removers that use "photoionization" to apply vacuum UV light to remove static electricity. This innovative ionization method makes use of unique features of vacuum UV light to eliminate unwanted electrostatic charges in a vacuum (depressurized state) which has been impossible up to now.
We provide E3444 series vacuum flanges that are designed for our VUV Ionizers.
(General purpose specifications)
|Flanges||－ (*1)||JIS VG50||ICF114||－|
|Sealing method||O-ring||Cu gasket||－|
|Leak amount||1 x 10-10 Pa m3/s (*2)||－|
*1: Prepare a flange that matches the E3444 contour.
*2: Result measured with helium leak detector.
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