In a MEMS mirror, a metallic coil is formed on a single-crystal silicon, a mirror is formed inside the coil through MEMS processing, and a magnet is arranged beneath the mirror. Within a magnetic field generated by the magnet, electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that causes the mirror to tilt. In addition, the mirror can be driven two-dimensionally with the combination of two springs formed by MEMS processing. The path of the laser light incident on the mirror surface is varied in this way to scan and project. Compared to the electrostatic or piezoelectric driven mirrors, electromagnetically driven MEMS mirrors are lower voltage driven and easier to use.
MEMS mirrors are smaller, have dual-axis capability and lower cost compared to galvano mirrors.
Hamamatsu MEMS mirrors have adopted electromagnetic drive based on MEMS and opto-semiconductor technologies.
|Parameter||MEMS mirror (Electromagnetic)||Galvano mirror|
|Drive method||Electro-magnetic (Lorentz force)||Motor (Lorentz force)|
|Optical deflection angle||Limited||Large|
|Device size||Very small||Bulky|
|Dual-axis compatibility||Possible by 1 unit||Requiring 2 units|
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