Captures wide spectrum (emission) from (plasma) radicals or ions. (200 nm to 950 nm)
Continuously measures up to 15 000 spectra at an interval of 20 msec (50 msec with concurrent running of detection software)
A high resolution spectrometer and a ultra-high sensitive photo detector are firmly locked in position to assure the acquisition of accurate spectrum and precise spectrum responsivity data through sharply focused plasma emission spectrum images.
Detects the UV spectrum region from 200 nm with high sensitivity.
The equipped optical fiber can be easily attached to plasma chambers through a SMA connector widely used.
A single analysis unit can control up to four C10346-01 Multiband plasma-process monitor via a USB 2.0 interface.
The data acquisition software stores the spectrum data into the database during plasma process. This stored data can then be used for spectrum data calculations.
High sensitive endpoint detection and real-time monitoring of process abnormality are achieved by creating ''detection model''.
It looks like you're in the . If this is not your location, please select the correct region or country below.
You're headed to Hamamatsu Photonics website for US (English). If you want to view an other country's site, the optimized information will be provided by selecting options below.
For modern websites to work according to visitor’s expectations, they need to collect certain basic information about visitors. To do this, a site will create small text files which are placed on visitor’s devices (computer or mobile) - these files are known as cookies when you access a website. Cookies are used in order to make websites function and work efficiently. Cookies are uniquely assigned to each visitor and can only be read by a web server in the domain that issued the cookie to the visitor. Cookies cannot be used to run programs or deliver viruses to a visitor’s device.
Cookies do various jobs which make the visitor’s experience of the internet much smoother and more interactive. For instance, cookies are used to remember the visitor’s preferences on sites they visit often, to remember language preference and to help navigate between pages more efficiently. Much, though not all, of the data collected is anonymous, though some of it is designed to detect browsing patterns and approximate geographical location to improve the visitor experience.
Certain type of cookies may require the data subject’s consent before storing them on the computer.
This website uses two types of cookies:
There are two ways to manage cookie preferences.
If you wish to restrict or block web browser cookies which are set on your device then you can do this through your browser settings; the Help function within your browser should tell you how. Alternatively, you may wish to visit www.aboutcookies.org, which contains comprehensive information on how to do this on a wide variety of desktop browsers.
Occasionally, we may use internet tags (also known as action tags, single-pixel GIFs, clear GIFs, invisible GIFs and 1-by-1 GIFs) at this site and may deploy these tags/cookies through a third-party advertising partner or a web analytical service partner which may be located and store the respective information (including your IP-address) in a foreign country. These tags/cookies are placed on both online advertisements that bring users to this site and on different pages of this site. We use this technology to measure the visitors' responses to our sites and the effectiveness of our advertising campaigns (including how many times a page is opened and which information is consulted) as well as to evaluate your use of this website. The third-party partner or the web analytical service partner may be able to collect data about visitors to our and other sites because of these internet tags/cookies, may compose reports regarding the website’s activity for us and may provide further services which are related to the use of the website and the internet. They may provide such information to other parties if there is a legal requirement that they do so, or if they hire the other parties to process information on their behalf.
If you would like more information about web tags and cookies associated with on-line advertising or to opt-out of third-party collection of this information, please visit the Network Advertising Initiative website http://www.networkadvertising.org.
We use third-party cookies (such as Google Analytics) to track visitors on our website, to get reports about how visitors use the website and to inform, optimize and serve ads based on someone's past visits to our website.
You may opt-out of Google Analytics cookies by the websites provided by Google:
We inform you that in such case you will not be able to wholly use all functions of our website.